Lithography process control
por Harry J. Levinson- Primera publicación
- 1999
- Editores
- SPIE Optical Engineering Press
- Sujetos
- Semiconductors·Etching·Microlithography·Quality control
This is one of the best texts I've seen in terms of understanding SPC's and DOE's for microlithography. This text is very very helpful for setting up SPC's for lithographic processes.
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